All
Controllers
Temperature
Control ranges from 80K to 1000°C.
Pressure
Vacuum pressure control from 0.001 to 1000 Torr with precise stabilization.
MFC
Precision MFC system with 0.01% to 100% control range and 100:1 turndown ratio supporting up to 130 gases.
Humidity
Precision humidity system with 4% to 95% RH range and 0.1% RH accuracy, compatible with N2, air, and Ar.