Pressure Controller

Precision Vacuum Pressure Control System

The Precision Vacuum Pressure control system can control partial pressure with the desire gas by adjusting the flow.
The software can automatically acquest and maintain it as a recipe.

Gauge Type Baratron Absolute Capacitance Manometer
Range of guage A 0.001 – 1 torr
Range of guage B 1 - 1000 torr
Typical Accuracy 0.25% of reading
Resolution 0.001% of full scale guage A: 0.00001 Torr
guage B: 0.01 Torr
Pressure Control Range 0.001 - 1000 torr
Resolution 0.001 - 1 Torr: 0.0003 Torr
1 - 1000 Torr: 0.25 Torr
Gas Flow Rate MFC Low (for range 0.001 - 1 torr) 0.01 - 5 SCCM
MFC High (for range 1 - 1000 torr) 0.4 - 200 SCCM
Typical Warm-Up Time > 30 min
Stabilization Time in Target Pressure < 10 min
Pressure Control Type Double PID
Required power 265 VA MAX
Connection Port Gas for Shut-off Valve 1/4" Swagelok tube fitting
MFC Gas Inlet/Outlet 1/4" Swagelok tube fitting

Dimension

Pressure controller's dimension top view
Pressure controller's dimension 3D view
Top 3D
Pressure controller's dimension front view
Pressure controller's dimension right view
Front Right

Diagram

Pressure controller's diagram

Technical Data

Pressure controller's data

Figure. Pressure control performance of PCS-WP from 0.005 Torr to 1000 Torr.