Precision MFC Gas Control Stage
The Ultimate Solution for Precise and Stable Flow Control
The PMGC –XX Gas Flow Station, built with the mass flow control unit, gas flow pipeline, and electrical components, is the ideal solution for various applications demanding precise and stable flow control.
Versatile Gas Control
The Precision MFC gas control stage offers exceptional flexibility, supporting over 130 userselectable gases. Whereas conventional MFCs are restricted to a single gas type, this system enables seamless gas switching and precise concentration adjustments. Its compact design ensures efficient integration into various applications requiring dynamic gas control.
Ease of Use
Ready for operation with just a few gas lines and a USB connection.
| Mass Flow Accuracy | 0.5 SCCM – 5 SCCM | ±0.8% of reading and ±0.2% of full scale |
|---|---|---|
| 10 SCCM – 20 SLPM | ±0.6% of reading or ±0.1% of full scale, whichever is greater | |
| Corrosion – resistant | ±0.8% of reading and ±0.2% of full scale | |
| Steady State Control Range | 0.5 SCCM – 5 SCCM/ 10 SCCM – 20 SLPM |
0.01 – 100 % of full scale |
| Corrosion – resistant | 1 – 100 % of full scale | |
| Typical Control Response Time | 0.5 SCCM – 5 SCCM | As fast as 100 ms, flow rate dependent, user adjustable |
| 10 SCCM – 20 SLPM | As fast as 30 ms, flow rate dependent, user adjustable | |
| Recommended Pressure for gas inlet | 2 – 5 barg | |
| Recommended operating pressure for pneumatic valves | 4 – 5 barg | |
| Gas Line Fitting | 1/4" tube fitting | |
| Operating Temperature Range | -10 – 60 °C | |
| Typical Warm-Up Time | < 1 s | |
| Required Power | 230VA MAX | |
| STP Reference Conditions | 25 °C and 1atm (default), user configurable | |
| NTP Reference Conditions | 0 °C and 1 atm (default), user configurable | |
| Gas Select | 130 user-selectable gases stored internally. Each gas optimized to match NIST's REFPROP 10 gas property calculations across the operating temperature and pressure ranges for highest accuracy | |
| COMPOSER | 20 user-definable gas mixes. Each mix may have up to 5 gases with 0.01 % composition precision | |
Dimension
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| Top | 3D |
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| Front | Right |
Diagram
Selection Guide
| NEXTRON | Typical Competitors | Remarks | |
|---|---|---|---|
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Steady State Control Range |
0.01% ~100% ( 10000:1 turndown ratio)* |
5% ~100% (20:1 turndown ratio) |
Low full-scale |
| 2% ~ 100% (50:1 turndown ratio) |
Large full-scale (>500sccm) |
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Flexibility of Gas Connections |
130+ user-selectable gases | Only a single gas type with a fixed concentration | Refer to diagram |
* It has a turndown ratio of 100:1, even for corrosive gases, which is higher than that of typical competitors.
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