Humidity sensor can be optionally
installed inside the all chambers of Micro
Probe System.
The Precision Humidity Control System
consists of a two-channel MFC, DI water
bubbling bath and humidity control
software.
Precise control of relative humidity can be
quickly achieved PID control method.
Humidity Control Range | 4 - 95 %RH |
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Normal Ramp Speed | 10 %RH / min |
Typical Accuracy of Humidity | 2 %RH (@ 1 - 97 %RH) |
RH Resolution | 0.1 %RH |
Total Flow Rate | 1000 SCCM |
Gas Flow Range | 0 – 1000 SCCM |
Flow Rate Accuracy | ±2 % of full scale |
Gas Line Fitting | 1/4 inch tube fitting |
Carrier Gas | N2 (recommanded), Air, Ar |
Bubbling Bath Volume | 200 cc |
Required Power | 24 VA Max. |
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Top | 3D |
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Front | Right |
Figure. (a) Schematic diagram of the custom-made early detection of pipeline leak etection system consisting of PtSe2 nanograin-based humidity sensor, (b) precise detection of input humidity pulses by the PtSe2-based humidity sensor, (c) response of best-in-class reference humidity sensor for comparison.
Figure. IV characteristics of ε-Ga2O3 layers when exposed to different concentrations of (a) H2, (b) NO2, (c) O2, and (d) CO.