Products Controllers Humidity Control System

HumidityController Image

Precision Humidity Control System

Humidity sensor can be optionally installed inside the all chambers of Micro Probe System.
The Precision Humidity Control System consists of a two-channel MFC, DI water bubbling bath and humidity control software.
Precise control of relative humidity can be quickly achieved PID control method.

Humidity Control Range 4 – 95 %RH
Normal Ramp Speed 10 %RH / min
Typical Accuracy of Humidity 2 %RH (@ 1 – 97 %RH)
RH Resolution 0.1 %RH
Total Flow Rate 1000 SCCM
Gas Flow Range 0 – 1000 SCCM
Flow Rate Accuracy ±2 % of full scale
Gas Line Fitting 1/4 inch tube fitting
Carrier Gas N2 (recommanded), Air, Ar
Bubbling Bath Volume 200 cc
Required Power 24 VA Max.

Dimension

(Unit: mm)
humidity controller's dimension top view
humidity controller's dimension 3D view
Top 3D
humidity controller's dimension front view
humidity controller's dimension right view
Front Right

Diagram

Humidity controller's diagram

Technical Data

Humidity controller's data

Technical Data

Humidity controller's application1

Figure. (a) Schematic diagram of the custom-made early detection of pipeline leak etection system consisting of PtSe2 nanograin-based humidity sensor, (b) precise detection of input humidity pulses by the PtSe2-based humidity sensor, (c) response of best-in-class reference humidity sensor for comparison.

Technical Data

Humidity controller's application2

Figure. IV characteristics of ε-Ga2O3 layers when exposed to different concentrations of (a) H2, (b) NO2, (c) O2, and (d) CO.