Gas Sensor Measurement System
(GSS)
Gas Flow Control
Specification
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- Small size for compact set-up:
324 × 233 × h170 mm - Two options of control range:
GSS-PT(10 ~ 200 °C) / GSS-CHL(RT ~ 450 °C) - High accuracy of mass flow control
(±0.4 % of reading and ±0.2 % of full scale) - Various gas selection:
150+ gases including corrosive ones & 20 settings of mixed gas
Gas Selection
| Mass flow | 500 SCCM | Single gas | Standard | 128 selectable gas such as Air, N2, Ar, H2, ... |
| Mixed gas | Corrosive | 32 selectable gas such as NH3, Cl2, NO, ... |
| 20 definable gas mixes (possibly up to 5 gases with 0.01 % composition resolution) | ||
