Gas Sensor Measurement System
(GSS)
Compact gas sensor measurement system with precise temperature control and flexible multi-gas selection.
| Temperature Range |
10 – 200 °C (GSS-PT) |
| RT – 450 °C (GSS-CHL) |
| Maximum Cooling / Heating Rate |
60 °C/min |
| Temperature Accuracy |
±0.1 °C (GSS-PT) |
|
±1 °C (GSS-CHL)
|
| Temperature Resolution |
0.1 °C (GSS-PT) |
| 1 °C (GSS-CHL) |
| Sample Stage Dimension |
19 × 19 mm (GSS-PT) |
| Ø 12.7 mm (GSS-CHL) |
| Stage Material |
Rhodium coated copper (GSS-PT) |
| Alumina (GSS-CHL) |
| Window * |
Ø 43 mm (Fused Silica)
|
| Number of Probes in Standard Chamber
|
4 |
| Probe Module |
Smart Tracking Probe |
| Probe Module Stroke (X-Axis) |
12 mm |
| Material of the Probe Tip |
Tungsten |
| Probe Tip Diameter |
50 or 100 µm |
|
Number of MFC unit
** |
1 to 4 channels selectable |
| Vacuum Test |
< 10E-3 mbar at RT (With Rotary Pump) |
| < 10E-5 mbar at RT (With Turbo Pump) |
| Vacuum & Vent Line Fitting |
1/4" Tube Fitting |
| Leakage Current |
< 100 pA (Coaxial) |
| < 100 fA (Triaxial) |
| Maximum DC Voltage |
300 V |
| Maximum Current |
1000 mA |
| Maximum Frequency
|
300 MHz (< 3 dB) |
* For comprehensive information on windows, please refer to the window selection guide for optical covers.
** For comprehensive information on MFC unit of GSS, please refer to the PMGC Specification.
| Gas selection |
| Mass flow |
500 SCCM |
| Single gas |
Standard |
128 selectable gas
such as Air, N2, Ar, H2, ... |
| Mixed gas |
Corrosive |
32 selectable gas
such as NH3, Cl2, NO, ... |
| 20 definable gas mixes
(possibly up to 5 gases with 0.01 %
composition resolution) |
Dimension
(Unit: mm)
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