Gas Sensor Measurement System
(GSS)

Compact gas sensor measurement system with precise temperature control and flexible multi-gas selection.

Temperature Range	10 – 200 °C (GSS-PT)
	RT – 450 °C (GSS-CHL)
Maximum Cooling / Heating Rate	60 °C/min
Temperature Accuracy	±0.1 °C (GSS-PT)
	±1 °C (GSS-CHL)
Temperature Resolution	0.1 °C (GSS-PT)
	1 °C (GSS-CHL)
Sample Stage Dimension	19 × 19 mm (GSS-PT)
	Ø 12.7 mm (GSS-CHL)
Stage Material	Rhodium coated copper (GSS-PT)
	Alumina (GSS-CHL)
Window *	Ø 43 mm (Fused Silica)
Number of Probes in Standard Chamber	4
Probe Module	Smart Tracking Probe
Probe Module Stroke (X-Axis)	12 mm
Material of the Probe Tip	Tungsten
Probe Tip Diameter	50 or 100 µm
Number of MFC unit **	1 to 4 channels selectable
Vacuum Test	< 10E-3 mbar at RT (With Rotary Pump)
	< 10E-5 mbar at RT (With Turbo Pump)
Vacuum & Vent Line Fitting	1/4" Tube Fitting
Leakage Current	< 100 pA (Coaxial)
	< 100 fA (Triaxial)
Maximum DC Voltage	300 V
Maximum Current	1000 mA
Maximum Frequency	300 MHz (< 3 dB)

* For comprehensive information on windows, please refer to the window selection guide for optical covers.
** For comprehensive information on MFC unit of GSS, please refer to the PMGC Specification.

Gas selection
Mass flow	500 SCCM
Single gas	Standard	128 selectable gas such as Air, N2, Ar, H2, ...
Mixed gas	Corrosive	32 selectable gas such as NH3, Cl2, NO, ...
	20 definable gas mixes (possibly up to 5 gases with 0.01 % composition resolution)

Dimension

(Unit: mm)

Top	3D
Front	Right