SPM(scanning probe microscopy) Probe System

Combine precise temperature control with electrical probing for in-situ electrical and topographical measurements.

SPM(scanning probe microscopy) Probe System
Dimension	90(l) × 35(w) × 20(h) mm
Stage size	16 × 16 mm
Temperature range	-30 ~ 150 °C 1)
Max. Ramping Rate	30 °C/min
Temperature Accuracy	±0.1 °C

¹⁾ The lower limit of the temperature range is typically attained when a coolant is approximately 0 °C.

SPM(scanning probe microscopy) Thermal Stage

SPM(scanning probe microscopy) Thermal Stage
Dimension	20(l) × 26.5(w) × 6.5(h) mm
Stage size	16 × 16 mm
Temperature range	RT ~ 150 °C
Max. Ramping Rate	30 °C/min
Temperature Accuracy	±0.1 °C