RF Micro Probe System with GSG Probe

RF micro probe system with GSG probes supporting up to 60 GHz measurements and XYZ micropositioning.

Category		PZRFMPS-PT	PZRFMPS-PTH	PZRFMPS-LN	PZRFMPS-LNH
Temperature Range		-40 to 200 °C	-40 to 170 °C	80K to RT	80K to RT
Maximum Cooling / Heating Rate		60 °C/min		20 °C/min	10 °C/min
Temperature Accuracy		±0.1 °C		±1 °C
Temperature Resolution		0.1 °C
Sample Stage Dimension		19 × 19 mm	16 × 16 mm	20 × 20 mm
Stage Material		Copper-plated special alloy		Copper
Window *		Ø 43 mm (Fused Silica)
Number of Probes in Standard Chamber **		2
Probe Module		Piezo Driven XYZ module
Piezo Module Stroke (X ,Y, Z Axis)		20 × 20 × 20 mm
Piezo Module Speed(Typical Max)		10 mm/s
Optical Encoder Resolution		12.5 nm
Absolute Accuracy		±2.5 μm
Vacuum Test		1E-2 mbar at RT (With Rotary Pump)
		1E-3 mbar at RT (With Turbo Pump)
Vacuum & Gas Line Fitting	Basic	1/4 in. tube fitting (Swagelok®-type)
	Optional	NW16
Leakage Current		< 100 pA (Coaxial)
		< 100 fA (Triaxial)
Maximum DC Voltage		300 V
Maximum Current		1000 mA
Maximum Frequency		300 MHz (< 3 dB)

* For comprehensive information on windows, please refer to the window selection guide for optical covers.
** Customization is available for the number of probes.

GSG Probe Tip 1),2)
Standard Pitch Range	25 to 2540 μm
Minimum Pad Size	80 × 80 μm
Maximum Frequency	60 GHz

¹⁾ Dual Type GSG Probe is also available
²⁾ The number of probes in the chamber can be configured with 1, 2, or custom configurations.

Dimension

Top	3D
Front	Right

GSG Probe Tip Close up