Micro Probe System, the trade name of NEXTRON Corporation, is a unique instrument suitable for analyzing the Electrical and Optical properties of materials. Its advantage is the in-situ measuring of the electrical and optical properties under the various environmental conditions; Vacuum, Temperature, Gas flow, Humidity, Irradiation of light. It has a small internal volume, less than 100cc. The probing method of MPS is very easy and unique. It is possible to use combining other instruments such as a vacuum pump and MFC.