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MPS Probe Tips

It is a great advantage that the contact does not become unstable even if there is movement due to thermal expansion and vibration.

Rh Wire Probe

Tip dia: 250 μm, 500 μm

Max operating temp 1000°C

Great durability at high temperature

Tungsten Probe

Tip dia: 50 μm, 100 μm

Max operating temp 450°C

Plate: Rh

Inconel Probe

Tip dia: 300 μm

Max operating temp 450°C

Plate: Au or Rh

Strong sample fixation

Rh Wire Probe

Tip dia: 250 μm, 500 μm

Max operating temp 1000°C

Great durability at high temperature

Tungsten Probe

Tip dia: 50 μm, 100 μm

Max operating temp 450°C

Plate: Rh

Inconel Probe

Tip dia: 300 μm

Max operating temp 450°C

Plate: Au or Rh

Strong sample fixation

Standard Optical Cover

Window: sapphire 0.43 T

Apature : xx mm

EM & Light Shielding Cap for Standard Optical Cover

Standard Optical Cover

Window: sapphire 0.43 T

Apature : xx mm

EM & Light Shielding Cap for Standard Optical Cover

Gas Shower Head Type Cover for Fast Gas Responsiveness

Metal mesh outlet

Gas Shower Head Type Cover for Fast Gas Responsiveness

Standard Swagelok type inlet

Gas Shower Head Type Cover for Fast Gas Responsiveness

Metal mesh outlet

Gas Shower Head Type Cover for Fast Gas Responsiveness

Standard Swagelok type inlet

Optical Breadboard

Convenient mount with digital microscope and External XYZ Micro Positioner Module.

350 x 350 mm

only 2.3 kg

metric or imperial type

External XYZ Micro positioner module

Stable contact is possible up to a 200μm contact pad when using an external position option.

External XYZ Micro positioner module

Stable contact is possible up to a 200μm contact pad when using an external position option.

Optical Breadboard

Convenient mount with digital microscope and External XYZ Micro Positioner Module.

350 x 350 mm

only 2.3 kg

metric or imperial type

• This fixture is not an off-the-shelf product and is supplied through customized manufacturing after the consultation with customers.

Polymer Capacitance Measurement Fixture

Polymer Fixture equipped on the Peltier Stage useful to measure the dielectric property of a polymer film.

Especially, the reliability of the measurement can be improved as it can give a constant contact-pressure by one probe module.

Polymer Capacitance Measurement Fixture

Polymer Fixture equipped on the Peltier Stage useful to measure the dielectric property of a polymer film.

Especially, the reliability of the measurement can be improved as it can give a constant contact-pressure by one probe module.

• This fixture is not an off-the-shelf product and is supplied through customized manufacturing after the consultation with customers.

Piezo-Driven probe

Ultra compact piezo module

The contact point can be moved while maintaining vacuum tightness.
For small contact pads from several um to hundreds of um, a piezo probe is recommended.


Speed : 15mm /s
Stroke (X , Y axis) 8mm
Stroke (Z - axis) 3mm
Holding Force : 250gf ~ 300gf
Manipulate Dimension : 20 x 20 x 30mm
Resolution : < 1um (Depends on temp. and vaccum degree) Precision Vacuum Pressure Control System

Piezo-Driven probe

Ultra compact piezo module

The contact point can be moved while maintaining vacuum tightness. For small contact pads from several um to hundreds of um, a piezo probe is recommended.


Speed : 15mm /s
Stroke (X , Y axis) 8mm
Stroke (Z - axis) 3mm
Holding Force : 250gf ~ 300gf
Manipulate Dimension : 20 x 20 x 30mm
Resolution : < 1um (Depends on temp. and vaccum degree) Precision Vacuum Pressure Control System