Products Chambers Standard Chambers MPS-PT

MPS-PT

Designed for vacuum and temperature-controlled electrical measurements, supporting a range from -40°C to 200 °C.

Temperature Range	-40 – 200 °C
Maximum Cooling / Heating Rate	60 °C/min
Temperature Accuracy	±0.1 °C
Temperature Resolution	0.1 °C
Sample Stage Dimension	19 × 19 mm
Stage Material	Rhodium coated copper
Window *	Ø 43 mm (Fused Silica)
Number of Probes in Standard Chamber **	4, 6, 8, 10, 13
Probe Module	Smart Tracking Probe
Probe Module Stroke (X-Axis)	12 mm
Probe Tip	Tungsten Probe
Probe Tip Diameter	50 or 100 µm
Vacuum Test	< 10E-3 mbar at RT (With Rotary Pump)
	< 10E-5 mbar at RT (With Turbo Pump)
Vacuum & Vent Line Fitting	Basic	1/4, 1/8" Swagelok Tube Fitting
	Optional	NW16
Leakage Current	< 100 pA (Coaxial)
	< 100 fA (Triaxial)
Maximum DC Voltage	300 V
Maximum Current	1000 mA
Maximum Frequency	300 MHz (< 3 dB)

* For comprehensive information on windows, please refer to the window selection guide for optical covers.
** Customization is available for the number of probes.

Dimension

Technical Data