Products Chambers Chamber Collection MPS-CHL

MPS-CHL

Designed for high-temperature measurements, supporting 450 °C with optical access for enhanced analysis.

Temperature Range	RT – 450 °C
Maximum Cooling / Heating Rate	60 °C/min
Temperature Accuracy	±1 °C
Temperature Resolution	1 °C
Sample Stage Dimension	Ø 12.7 mm
Stage Material	Alumina
Window *	Ø 43 mm (Fused Silica)
Number of Probes in Standard Chamber **	4, 6, 8, 10, 13
Probe Module	Mechanically-following type
Probe Module Stroke (X-Axis)	12 mm
Probe Tip	Tungsten Probe
Probe Tip Diameter	50 or 100 µm
Vacuum Test	1E-2 mbar at RT (With Rotary Pump)
	1E-4 mbar at RT (With Turbo Pump)
Vacuum & Vent Line Fitting	Basic	1/4, 3/8" Swagelok Tube Fitting
	Optional	NW16
Leakage Current	< 100 pA (Coaxial)
	< 100 fA (Triaxial)
Maximum DC Voltage	300 V
Maximum Current	1000 mA
Maximum Frequency	300 MHz (< 3 dB)

* For comprehensive information on windows, please refer to the window selection guide for optical covers.
** Customization is available for the number of probes.

Dimension

Technical Data